Eléments de l'association
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List of bibliographic references
Number of relevant bibliographic references: 1.| Ident. | Authors (with country if any) | Title |
|---|---|---|
| 001567 | X. T. Chen [Singapour] ; D. Gui [Singapour] ; Z. Q. Mo [Singapour] ; A. Y. Du [Singapour] ; D. Z. Chi [Singapour] ; W. D. Wang [Singapour] ; Y. H. Wang [Singapour] ; D. Lu [Singapour] ; L. J. Tang [Singapour] ; W. H. Li [Singapour] ; L. Y. Wong [Singapour] | Effect of plasma process on low-k material and barrier layer performance |
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